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Journal article
Novel Capacitive Pressure Sensor
Journal of microelectromechanical systems, Vol.19(3), pp.443-450
06/01/2010
Web of Science ID: WOS:000278537900002
Abstract
A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ¿F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ¿m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic). The assembly constitutes a parallel-plate capacitor where the surface area of the electrodes is variable to a high degree. The mercury drop is pressured by a small corrugated metal diaphragm. As the electrode area of the parallel-plate capacitor varies, a total change in capacitance of more than 6 ¿F is obtained.
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Details
- Title
- Novel Capacitive Pressure Sensor
- Publication Details
- Journal of microelectromechanical systems, Vol.19(3), pp.443-450
- Resource Type
- Journal article
- Publisher
- IEEE
- Copyright
- © 2010 IEEE
- Identifiers
- WOS:000278537900002; 99380175879906600
- Academic Unit
- Dr. Muhammad Harunur Rashid Department of Electrical and Computer Engineering; Hal Marcus College of Science and Engineering
- Language
- English