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Journal article
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology
Journal of microelectromechanical systems, Vol.31(2), pp.298-304
04/2022
Web of Science ID: WOS:000792914800019
Abstract
This paper introduces a new angular position sensor that measures 3 mm (diameter) by 0.5 mm (thickness); and it is therefore a MEMS scale sensor. The sensor's operating principle is variable capacitance; however, unlike ordinary variable capacitance transducers, the new sensor is based on the concept of creating a variable Ultracapacitor (or Supercapacitor). One degree of rotation in the present sensor results in a capacitance variation of 1.5 ~\mu \text{F} , which is very substantial by comparison with other types of variable capacitance transducers of the same dimensions. The sensitivity of this new sensor is therefore substantially high. It will be suitable for applications that require a MEMS-scale transducer and high sensitivity. [2021-0168]
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Details
- Title
- MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology
- Publication Details
- Journal of microelectromechanical systems, Vol.31(2), pp.298-304
- Resource Type
- Journal article
- Publisher
- IEEE
- Copyright
- © IEEE
- Identifiers
- WOS:000792914800019; 99380175950906600
- Academic Unit
- Dr. Muhammad Harunur Rashid Department of Electrical and Computer Engineering; Hal Marcus College of Science and Engineering
- Language
- English