A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has demonstrated a change in inductance of approximately 34.5 mH over a pressure range of 10 kPa. The sensor offers a number of desirable features, including linearity, low temperature, and pressure hysteresis, in addition to small size.
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Title
High-Sensitivity Inductive Pressure Sensor
Publication Details
IEEE transactions on instrumentation and measurement, Vol.60(8), pp.2960-2966