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Journal article
Capacitive Pressure Sensor With Very Large Dynamic Range
IEEE transactions on components and packaging technologies, Vol.33(1), pp.79-83
03/01/2010
Web of Science ID: WOS:000275560000010
Abstract
A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.
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Details
- Title
- Capacitive Pressure Sensor With Very Large Dynamic Range
- Publication Details
- IEEE transactions on components and packaging technologies, Vol.33(1), pp.79-83
- Resource Type
- Journal article
- Publisher
- IEEE
- Copyright
- © 2009 IEEE
- Identifiers
- WOS:000275560000010; 99380175952006600
- Academic Unit
- Hal Marcus College of Science and Engineering ; Dr. Muhammad Harunur Rashid Department of Electrical and Computer Engineering
- Language
- English